A thin-film magnetoresistive angle detector

An overview is given of the results of our research on a contactless angle detector based on the anisotropic magnetoresistance effect (AMR effect) in a permalloy thin film. The results of high-temperature annealing treatment of the pemalloy film are discussed. Such a treatment suppresses the effects...

Full description

Saved in:
Bibliographic Details
Published in:Sensors and actuators. A. Physical. 1990-06, Vol.22 (1-3), p.795-798
Main Authors: Eijkel, Kees J.M., Wieberdink, Johan W., Fluitman, Jan H.J., Popma, Theo J.A., Groot, Peter, Leeuwis, Henk
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:An overview is given of the results of our research on a contactless angle detector based on the anisotropic magnetoresistance effect (AMR effect) in a permalloy thin film. The results of high-temperature annealing treatment of the pemalloy film are discussed. Such a treatment suppresses the effects of the uniaxial magnetic anisotropy that is present in a permalloy thin film and increases the AMR effect, thus improving the detector signal. The performance of the detector throughout a temperature range of 20 to 120 °C and the results of heat treatment at 125 °C for 1 week have been tested.
ISSN:0924-4247
1873-3069
DOI:10.1016/0924-4247(89)80080-9