Integrated magnetic field sensor

For small magnetic field measurements, Sextant Avionique is developing, in collaboration with the Ecole Supérieure d'Ingénieurs en Electrotechnique et Electronique, a new generation of miniature sensors. The detector is a mechanical resonator using a monocrystalline silicon beam. The excitation...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 1991-03, Vol.26 (1), p.357-361
Main Authors: Donzier, E., Lefort, O., Spirkovitch, S., Baillieu, F.
Format: Article
Language:English
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Summary:For small magnetic field measurements, Sextant Avionique is developing, in collaboration with the Ecole Supérieure d'Ingénieurs en Electrotechnique et Electronique, a new generation of miniature sensors. The detector is a mechanical resonator using a monocrystalline silicon beam. The excitation of this resonator is achieved through the Laplace force, operating on an alternating current flowing through a conductor deposited on the beam. The oscillation amplitude, which is proportional to the external magnetic field, is detected through a piezoresistive gauge bridge diffused in the silicon beam. The mechanical properties of the silicon and the resulting quality factor of the resonator have allowed a very sensitive device to be designed with a resolution in the nanotesla range. The manufacture of the resonator is possible through extensive use of micromachining and microelectronic technologies. It is then possible to produce a single wafer incorporating hundreds of small transducers at a very low unit cost.
ISSN:0924-4247
1873-3069
DOI:10.1016/0924-4247(91)87016-V