Design considerations for the thermal accelerometer

This paper presents some design and optimization aspects of the thermal accelerometer. The design and optimization strategy is based on a one-dimensional model describing both the thermal and mechanical properties of the device. It is shown that this model is reasonably in agreement with experiments...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 1992-04, Vol.32 (1), p.380-385
Main Authors: Hiratsuka, R., van Duyn, D.C., Otaredian, T., de Vries, P., Sarro, P.M.
Format: Article
Language:English
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Summary:This paper presents some design and optimization aspects of the thermal accelerometer. The design and optimization strategy is based on a one-dimensional model describing both the thermal and mechanical properties of the device. It is shown that this model is reasonably in agreement with experiments carried out on some prototype devices. The performance optimization criteria are based on the ‘maximally flat amplitude response’ from which the optimum design parameters can be calculated for a given bandwidth.
ISSN:0924-4247
1873-3069
DOI:10.1016/0924-4247(92)80016-V