Piezoelectric micromovement actuator and force sensor hybridization using a thick-film double-paste printing method

This paper describes the fabrication and characteristics of a new type of low-voltage ( 10 Hz, into the same multilayer element. The sensitivity (effective voltage) of the prototype transducer is ≈ 1 mV/N (≈ 0.35 mV/bar) (for 2.4 mm diameter, In acteff (sinusoidal) = 40 V and displacement ≈ 100 nm)....

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Bibliographic Details
Published in:Sensors and actuators. A, Physical Physical, 1994-04, Vol.42 (1), p.421-425
Main Authors: Moilanen, Hannu, Lappalainen, Jyrki, Laitinen, Leena, Leppävuori, Seppo
Format: Article
Language:English
Subjects:
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Servo and control equipment
robots
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Summary:This paper describes the fabrication and characteristics of a new type of low-voltage ( 10 Hz, into the same multilayer element. The sensitivity (effective voltage) of the prototype transducer is ≈ 1 mV/N (≈ 0.35 mV/bar) (for 2.4 mm diameter, In acteff (sinusoidal) = 40 V and displacement ≈ 100 nm). The suitable actuating frequency range is between 10 and 200 Hz, and the measurement range is 400 bar (20 kg loading mass). The sensitivity can be adjusted by changing the structure of the transducer.
ISSN:0924-4247
1873-3069
DOI:10.1016/0924-4247(94)80025-1