Influence of intermediate layers and base materials on adhesion of amorphous carbon and metal-carbon coatings

• Published in: Diamond and related materials 1992-04, Vol.1 (5), p.563-569
• Main Authors: Freller, H., Hempel, A., Lilge, J., Lorenz, H.P.
• Format: Article
• Language: English
• ISSN: 0925-9635; 1879-0062
• DOI: 10.1016/0925-9635(92)90166-L

Metal carbon (Me : C) and hydrogen-containing amorphous carbon (a-C : H) layers offer interesting possibilities for coating of tools because of their remarkable tribological features. But normally adhesion to steels used as base materials for tools is very low. A hybrid physical vapour deposition (PVD)-plasma chemical vapour deposition (PCVD) process was used to deposit zirconium (Zr)/intermediate layer/Zr : C. The a-C : H layers were deposited in a parallel plate reactor by PCVD with RF plasma. The graded Zr : C coating adheres well to various steels, very low adhesion is observed to a cobalt-containing steel and to cobalt-based hard metals. a-C : H adheres very well to silicon, glass, and aluminium (Al), but delamination in the bulk of the base material can occur due to high compressive stress. Adhesion to steel can be improved by thin layers of Al and tungsten (W), but different mechanisms seem to be the reasons for the improvement. The adhesion to hard metals increases with increasing WC content.