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Search for carbon nitride CNx compounds with a high nitrogen content by electron cyclotron resonance plasma deposition
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Published in: | Diamond and related materials 1994-02, Vol.3 (3), p.264-269 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0925-9635 |
DOI: | 10.1016/0925-9635(94)90090-6 |