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Search for carbon nitride CNx compounds with a high nitrogen content by electron cyclotron resonance plasma deposition

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Bibliographic Details
Published in:Diamond and related materials 1994-02, Vol.3 (3), p.264-269
Main Authors: Diani, M., Mansour, A., Kubler, L., Bischoff, J.L., Bolmont, D.
Format: Article
Language:English
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ISSN:0925-9635
DOI:10.1016/0925-9635(94)90090-6