Non-classical multilayer periodic structures based on DLC films

Properties a-C:HI/a-C:HII multilayer periodic structures and individual layers were studied by X-ray diffraction, ESCA, SIMS, optical and electrical measurements. It was shown that obtained multilayer structures can be termed non-classical because they can be formed without changing the layer compos...

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Bibliographic Details
Published in:Diamond and related materials 1996-04, Vol.5 (3-5), p.448-452
Main Authors: Kondrashov, P.E., Smirnov, I.S., Novoselova, E.G., Baranov, A.M.
Format: Article
Language:English
Subjects:
Multilayer periodic structures
Properties
Structure
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Summary:Properties a-C:HI/a-C:HII multilayer periodic structures and individual layers were studied by X-ray diffraction, ESCA, SIMS, optical and electrical measurements. It was shown that obtained multilayer structures can be termed non-classical because they can be formed without changing the layer composition at the interface. The models of a-C and a-C:H layer structure were discussed. The experimental results obtained show that the structure of a-C and a-C:H films cannot be considered as cluster structures.
ISSN:0925-9635
1879-0062
DOI:10.1016/0925-9635(95)00436-X