IR transmission and reflection study of lamellar silicon grating-wafer structures

IR normal transmission and angular reflection spectra are studied for lamellar silicon grating-wafer structures. The grating dimensions are comparable with the radiation wavelengths 2.2–22 μm. The spectra were measured using the FTIR system. Numerical simulations of the spectra were carried out usin...

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Bibliographic Details
Published in:Infrared physics & technology 1995-02, Vol.36 (2), p.639-647
Main Authors: Hava, S., Auslender, M., Lacquet, B.M., Coetzer, P.J., Swart, P.L.
Format: Article
Language:English
Subjects:
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Gratings
Infrared, submillimeter wave, microwave and radiowave instruments, equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Optical elements, devices, and systems
Optics
Physics
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Summary:IR normal transmission and angular reflection spectra are studied for lamellar silicon grating-wafer structures. The grating dimensions are comparable with the radiation wavelengths 2.2–22 μm. The spectra were measured using the FTIR system. Numerical simulations of the spectra were carried out using an operator-vector version of rigorous-coupled wave analysis. The theoretical results are in agreement with the measured spectra. The effect of grating structure on the manifestation of two inherent light absorption mechanisms of bulk silicon-interstitial oxygen vibrations and lattice phonons—is discussed. The results indicate the possibility of obtaining a narrow spectral absorber.
ISSN:1350-4495
1879-0275
DOI:10.1016/1350-4495(94)00043-K