Phase Imaging in the Near Field

The near-field scanning optical microscope (NSOM) circumvents diffraction limited resolution imposed on ordinary optical microscopes. We present a novel technique for obtaining simultaneous intensity, topography, and phase images having a lateral resolution of a few tens of nanometers for sample spe...

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Bibliographic Details
Published in:CIRP annals 2004, Vol.53 (1), p.483-486
Main Authors: Mayes, T.W., Riley, M.S., Edward, K., Fesperman, R., Suraktar, A., Shahid, U., Williams, S., Hocken, R.J.
Format: Article
Language:English
Subjects:
Microscope
Optical
Scanning Probe Microscopy
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Summary:The near-field scanning optical microscope (NSOM) circumvents diffraction limited resolution imposed on ordinary optical microscopes. We present a novel technique for obtaining simultaneous intensity, topography, and phase images having a lateral resolution of a few tens of nanometers for sample specimens ranging in thickness from a few nanometers to more than one micron. The most recent system utilizes a rotating mirror integrated with an environmentally stabilized, hybrid (part optical fiber, part air path) Mach-Zehnder interferometer for applications involving waveguide analysis, photoresist mask characterization, and biological imaging. Instrument specifications (software, hardware, and optical train) together with images obtained to date are presented.
ISSN:0007-8506
DOI:10.1016/S0007-8506(07)60745-8