Development of a Silicon-based Nanoprobe System for 3-D Measurements

A small 3-D probe system was developed based on sensing the bending of elastic hinges carrying the probe stylus. The stylus platform and elastic hinges are etched in silicon. On the elastic hinges, piezoresistive straingages are integrated, including the necessary wiring. The 3-D measurement range i...

Full description

Saved in:
Bibliographic Details
Published in:CIRP annals 2001, Vol.50 (1), p.365-368
Main Authors: Haitjema, H., Pril, W.O., Schellekens, P.H.J.
Format: Article
Language:English
Subjects:
CMM-probe
MEMS
silicon
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A small 3-D probe system was developed based on sensing the bending of elastic hinges carrying the probe stylus. The stylus platform and elastic hinges are etched in silicon. On the elastic hinges, piezoresistive straingages are integrated, including the necessary wiring. The 3-D measurement range is about one hundred micrometres in each direction and the repeatability is at the nanometre level. Several prototypes of these MEMS-type probe were realised in IC-technology successfully. Calibrations with a displacement generator based on laser interferometry reveal typical repeatabilities in the nanometre level and a 3-D uncertainty of the order of 25 nm.
ISSN:0007-8506
DOI:10.1016/S0007-8506(07)62141-6