Subsurface Damage Distribution in Ultraprecision Machined CdS

The extent and distribution of the subsurface damage in ultraprecision machined CdS was examined by the use of ion channeling using glancing angle detector positioning to provide enhanced depth resolution. Single crystal (0001) oriented CdS was diamond turned over the range of depths of cut of 0.1 –...

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Bibliographic Details
Published in:CIRP annals 1996, Vol.45 (1), p.519-522
Main Authors: Lucca, D.A., Maggiore, C.J., Rhorer, R.L.
Format: Article
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Mechanical engineering. Machine design
Precision engineering, watch making
subsurface damage
surfaces
ultra-precision machining
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Summary:The extent and distribution of the subsurface damage in ultraprecision machined CdS was examined by the use of ion channeling using glancing angle detector positioning to provide enhanced depth resolution. Single crystal (0001) oriented CdS was diamond turned over the range of depths of cut of 0.1 – 10 μm, and subsurface lattice disorder was examined for regions cut parallel to, and 30 degrees off, a preferred cleavage plane. Damage depths for the crystals machined along a preferred cleavage plane were found to be consistently larger than those machined 30 degrees off the plane.
ISSN:0007-8506
DOI:10.1016/S0007-8506(07)63115-1