ULSI and Carbon Product

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Bibliographic Details
Published in:Carbon (New York) 1998, Vol.36 (7), p.1248-1248
Main Authors: Sugawara, Katsuro, Fukuta, Hiroshi
Format: Article
Language:English
Online Access:Get full text
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ISSN:0008-6223
1873-3891
DOI:10.1016/S0008-6223(98)80014-6