Local nucleation of diamond heteroepitaxy on Si(100) in the initial stage and the role of atomic hydrogen

The reaction of atomic hydrogen with a C 2H 2-covered Si surface was studied using high-resolution electron-energy-loss spectroscopy, low-energy electron diffraction and Auger electron spectroscopy. The findings were that atomic hydrogen broke up the C–C bond in C 2H 2 and the Si–Si dimer to form C–...

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Bibliographic Details
Published in:Chemical physics letters 1998-06, Vol.289 (1), p.200-204
Main Authors: Xiao, Changyong, Feng, Ke-an, Lin, Zhangda, Zhang, Mingyu
Format: Article
Language:English
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Summary:The reaction of atomic hydrogen with a C 2H 2-covered Si surface was studied using high-resolution electron-energy-loss spectroscopy, low-energy electron diffraction and Auger electron spectroscopy. The findings were that atomic hydrogen broke up the C–C bond in C 2H 2 and the Si–Si dimer to form C–H and Si–H, respectively. In terms of experimental phenomena, a cluster model for quantum chemistry calculations was devised. The results agreed well with experiment; the role of atomic hydrogen and the nucleation mechanism of diamond heteroepitaxy on Si were discussed.
ISSN:0009-2614
1873-4448
DOI:10.1016/S0009-2614(98)00380-7