Non-invasive techniques for observing the surface behavior of molten silicon

The behavior of molten silicon surfaces was observed by using non-invasive techniques such as laser microscopy, phase-shift Michelson interferometry and CCD thermometry. The formation and oscillation of a non-axisymmetric temperature field due to surface-tension-driven flow instability was revealed...

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Bibliographic Details
Published in:Journal of crystal growth 2002-04, Vol.237, p.1854-1858
Main Authors: Hibiya, T., Nakamura, S., Sumiji, M., Azami, T.
Format: Article
Language:English
Subjects:
A2. Growth from melt
B2. Semiconducting silicon
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Summary:The behavior of molten silicon surfaces was observed by using non-invasive techniques such as laser microscopy, phase-shift Michelson interferometry and CCD thermometry. The formation and oscillation of a non-axisymmetric temperature field due to surface-tension-driven flow instability was revealed in a molten silicon bridge, which simulates floating zone configuration. For a flat surface, which represents a Czochralski melt, a hydrothermal wave was plausibly observed when the melt was shallow, whereas a cell pattern was observed during crystal growth when the melt was deep. The cell pattern was modified by application of a magnetic field.
ISSN:0022-0248
1873-5002
DOI:10.1016/S0022-0248(01)01825-5