Variation of silicon melt viscosity with boron addition

The viscosity of silicon melts was measured by an oscillating cup technique. It has been found that the viscosity of silicon melts decreases by adding boron. The reduction of viscosity causes enhanced melt flow. This variation of melt flow enhances the chemical reaction between the silicon melt and...

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Bibliographic Details
Published in:Journal of crystal growth 2002-04, Vol.237, p.1667-1670
Main Authors: Nishimura, Suzuka, Matsumoto, Satoru, Terashima, Kazutaka
Format: Article
Language:English
Subjects:
A1. Impurities
B2. Semiconducting silicon
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Summary:The viscosity of silicon melts was measured by an oscillating cup technique. It has been found that the viscosity of silicon melts decreases by adding boron. The reduction of viscosity causes enhanced melt flow. This variation of melt flow enhances the chemical reaction between the silicon melt and the quartz crucible.
ISSN:0022-0248
1873-5002
DOI:10.1016/S0022-0248(01)02317-X