Loading…

Effects of isotherm shapes on the point-defect behavior in growing silicon crystals

An analytical calculation on the behavior of point-defects in growing silicon crystals was performed with some types of temperature field, the isotherms of which are inclined, spherical and toroidal. The calculation concluded that the saturation of the point defects is affected not only by the tempe...

Full description

Saved in:
Bibliographic Details
Published in:Journal of crystal growth 2002-10, Vol.244 (2), p.142-156
Main Author: Ebe, Tadayuki
Format: Article
Language:English
Subjects:
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:An analytical calculation on the behavior of point-defects in growing silicon crystals was performed with some types of temperature field, the isotherms of which are inclined, spherical and toroidal. The calculation concluded that the saturation of the point defects is affected not only by the temperature gradient, the derivative of it and the pull rate but also by the inclination and the curvature of the isotherms. Quantitative formulation will be given later.
ISSN:0022-0248
1873-5002
DOI:10.1016/S0022-0248(02)01617-2