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GaAs epitaxy by chemical vapour transport under high, earth and low-gravity conditions
Homoepitaxy of GaAs on hemispherical substrates have been realised by chemical vapour transport in four different gravity levels. Experiments have been performed on earth, under 5 g and 10 g acceleration conditions using a centrifuge and under a microgravity environment (EURECA-I mission). The sourc...
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Published in: | Journal of crystal growth 1998, Vol.183 (1), p.1-9 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | Homoepitaxy of GaAs on hemispherical substrates have been realised by chemical vapour transport in four different gravity levels. Experiments have been performed on earth, under 5
g and 10
g acceleration conditions using a centrifuge and under a microgravity environment (EURECA-I mission). The source was either undoped GaAs or tin-doped GaAs. Analysis and comparison of the grown layers show that, in the applied conditions, the gravity level is not a relevant parameter and that tin is an inhibitor for the GaAs epitaxy. |
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ISSN: | 0022-0248 1873-5002 |
DOI: | 10.1016/S0022-0248(97)00414-4 |