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GaAs epitaxy by chemical vapour transport under high, earth and low-gravity conditions

Homoepitaxy of GaAs on hemispherical substrates have been realised by chemical vapour transport in four different gravity levels. Experiments have been performed on earth, under 5 g and 10 g acceleration conditions using a centrifuge and under a microgravity environment (EURECA-I mission). The sourc...

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Bibliographic Details
Published in:Journal of crystal growth 1998, Vol.183 (1), p.1-9
Main Authors: Chevrier, Véronique, Launay, Jean-Claude, Laügt, Sophie, Viraphong, Oudomsack, Gibart, Pierre
Format: Article
Language:English
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Summary:Homoepitaxy of GaAs on hemispherical substrates have been realised by chemical vapour transport in four different gravity levels. Experiments have been performed on earth, under 5 g and 10 g acceleration conditions using a centrifuge and under a microgravity environment (EURECA-I mission). The source was either undoped GaAs or tin-doped GaAs. Analysis and comparison of the grown layers show that, in the applied conditions, the gravity level is not a relevant parameter and that tin is an inhibitor for the GaAs epitaxy.
ISSN:0022-0248
1873-5002
DOI:10.1016/S0022-0248(97)00414-4