Grown-in point defects and microscopic defect formation in CZ silicon

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Bibliographic Details
Published in:Journal of crystal growth 1998-03, Vol.186 (1-2), p.113-127
Main Authors: Tiller, W.A, Friedman, M, Shaw, R, Cuendet, N, Halicioglu, T
Format: Article
Language:English
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ISSN:0022-0248
DOI:10.1016/S0022-0248(97)00467-3