Comparison between standard and near-field cathodoluminescence

High-resolution near-field cathodoluminescence (NF-CL) investigations were performed using a scanning near-field optical microscope/scanning electron microscope hybrid system. It has been demonstrated that structures that are not detectable with standard CL are now observable under near-field condit...

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Bibliographic Details
Published in:Journal of crystal growth 2000-03, Vol.210 (1), p.303-306
Main Authors: Heiderhoff, R, Sergeev, O.V, Liu, Y.Y, Phang, J.C.H, Balk, L.J
Format: Article
Language:English
Subjects:
Cathodoluminescence
Cathodoluminescence, ionoluminescence
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Near-field
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Other luminescence and radiative recombination
Physics
Scanning probe microscopes, components and techniques
SNOM
SPM
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Description
Summary:High-resolution near-field cathodoluminescence (NF-CL) investigations were performed using a scanning near-field optical microscope/scanning electron microscope hybrid system. It has been demonstrated that structures that are not detectable with standard CL are now observable under near-field conditions. In this presentation, we would like to compare SEM-CL and the new NF-CL with respect to future failure analyses. The advantages and disadvantages of both techniques will be illustrated and discussed.
ISSN:0022-0248
1873-5002
DOI:10.1016/S0022-0248(99)00701-0