Fluorine and hydrogen effects on the growth and transport properties of microcrystalline silicon from SiF4 precursor

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Bibliographic Details
Published in:Journal of non-crystalline solids 2002-04, Vol.299-302, p.113-117
Main Authors: Kasouit, S., Kumar, S., Vanderhaghen, R., Roca i Cabarrocas, P., French, I.
Format: Article
Language:English
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ISSN:0022-3093
DOI:10.1016/S0022-3093(01)01187-5