Mechanical stress in thin SiO2 and Ta2O5 films produced by reactive-low-voltage-ion-plating (RLVIP)

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Bibliographic Details
Published in:Journal of non-crystalline solids 1997-09, Vol.218, p.256-261
Main Authors: Strauss, Georg N., Quang Danh, Nguyen, Pulker, H.K.
Format: Article
Language:English
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ISSN:0022-3093
DOI:10.1016/S0022-3093(97)00167-1