Current status of failure analysis for ULSIs© 1997 IEEE. Reprinted with permission, from Proc. 1997 21st International Conference on Microelectronics, Nis, Yugoslavia, 14–17 September 1997, Vol. 2, pp. 591–598

Today, failure analysis (FA) is essential for developing process technologies and for improving the reliability and yield of large scale integrated circuits (LSIs). To show the current status of failure analysis, the recent progress in failure analysis techniques and the results of several case stud...

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Bibliographic Details
Published in:Microelectronics and reliability 1998-09, Vol.38 (9), p.1369-1377
Main Authors: Nakajima, S, Ueki, T, Shionoya, Y, Mafune, K, Kuji, N, Nakamura, S, Komine, Y, Takeda, T
Format: Article
Language:English
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Summary:Today, failure analysis (FA) is essential for developing process technologies and for improving the reliability and yield of large scale integrated circuits (LSIs). To show the current status of failure analysis, the recent progress in failure analysis techniques and the results of several case studies from our companies are described.
ISSN:0026-2714
1872-941X
DOI:10.1016/S0026-2714(98)00051-1