Double barrier structures in LiNbO3 waveguide created by MeV He+ implantation

The double barrier structures in a LiNbO3 waveguide have been investigated by 3.2 MeV He+ and 2.0 MeV He+ implantation to the dose of 3 × 1016 ions/cm2 and 1.5 × 1016 ions/cm2, respectively. The modes were measured using a prism (rutile) coupling method. The width of the modes is very irregular. The...

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Bibliographic Details
Published in:Optics communications 1997-09, Vol.141 (3-4), p.141-144
Main Authors: Wang, Ke-Ming, Lu, Fei, Meng, Ming-Qi, Li, Wei, Wang, Xiang, Shi, Bo-Rong, Zhou, Zhuang, Gao, Xue-Yan
Format: Article
Language:English
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Summary:The double barrier structures in a LiNbO3 waveguide have been investigated by 3.2 MeV He+ and 2.0 MeV He+ implantation to the dose of 3 × 1016 ions/cm2 and 1.5 × 1016 ions/cm2, respectively. The modes were measured using a prism (rutile) coupling method. The width of the modes is very irregular. The refractive index profile is analyzed based on the method by Fluck et al. [Appl. Phys. 74 (1993) 6023]. It is found that the measured mode indices of the waveguides are in agreement with the calculated mode indices. Also a damage study of double waveguides in LiNbO3 was performed by a Rutherford backscattering/channelling technique. The result shows that the channeling spectrum in the guiding region of the first waveguide is little different from that of virgin LiNbO3 crystal.
ISSN:0030-4018
1873-0310
DOI:10.1016/S0030-4018(97)00245-9