Oxygen annealing modification of conduction mechanism in thin rf sputtered Ta2O5 on Si

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Bibliographic Details
Published in:Solid-state electronics 2002-11, Vol.46 (11), p.1887-1898
Main Authors: Atanassova, E, Novkovski, N, Paskaleva, A, Pecovska-Gjorgjevich, M
Format: Article
Language:English
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ISSN:0038-1101
DOI:10.1016/S0038-1101(02)00134-X