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Experimental and theoretical studies of Si-CN bonds to eliminate interface states at Si/SiO2 interface

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Bibliographic Details
Published in:	Surface science 2003-09, Vol.542 (3), p.244-252
Main Authors:	MAIDA, Osamu, ASANO, Akira, TAKAHASHI, Masao, IWASA, Hitoo, KOBAYASHI, Hikaru
Format:	Article
Language:	English
Subjects:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport in interface structures Exact sciences and technology Metal-insulator-semiconductor structures (including semiconductor-to-insulator) Physics
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