Geometric structure of thin SiOxNy films on Si(100)

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Bibliographic Details
Published in:Surface science 1998-05, Vol.402-404, p.729-733
Main Authors: Behrens, K.-M, Klinkenberg, E.-D, Finster, J, Meiwes-Broer, K.-H
Format: Article
Language:English
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ISSN:0039-6028
DOI:10.1016/S0039-6028(97)00998-9