The effect of elevated silicon substrate temperature on TiSi 2 formatio from a Ti film

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Bibliographic Details
Published in:Thin solid films 2000-07, Vol.369 (1-2), p.244-247
Main Authors: Ezoe, K, Yamamoto, T, Ishii, K, Matsumoto, S
Format: Article
Language:eng ; jpn
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ISSN:0040-6090
DOI:10.1016/S0040-6090(00)00816-6