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Preparation of Zn1-xMgxO films by radio frequency magnetron sputtering

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Bibliographic Details
Published in:Thin solid films 2000-09, Vol.372 (1-2), p.173-176
Main Authors: MINEMOTO, Takashi, NEGAMI, Takayuki, NISHIWAKI, Shiro, TAKAKURA, Hideyuki, HAMAKAWA, Yoshihiro
Format: Article
Language:English
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ISSN:0040-6090
1879-2731
DOI:10.1016/s0040-6090(00)01009-9