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Low dielectric fluorinated amorphous carbon thin films grown from C6F6 and Ar plasma

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Bibliographic Details
Published in:	Thin solid films 2000-10, Vol.374 (1), p.103-108
Main Authors:	YI, Jeong W, LEE, Young H, FAROUK, Bakhtier
Format:	Article
Language:	English
Subjects:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Dielectric properties of solids and liquids Dielectrics, piezoelectrics, and ferroelectrics and their properties Exact sciences and technology Ion and electron beam-assisted deposition ion plating Materials science Methods of deposition of films and coatings film growth and epitaxy Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity) Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of bulk materials and thin films Permittivity (dielectric function) Physics
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