Preferential growth of thin rutile TiO2 films upon thermal oxidation of sputtered Ti films

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Bibliographic Details
Published in:Thin solid films 2002, Vol.402 (1-2), p.290-295
Main Authors: TING, Chu-Chi, CHEN, San-Yuan, LIU, Dean-Mo
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Corrosion protection
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Oxidation
Physics
Structure and morphology
thickness
Surface treatments
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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ISSN:0040-6090
1879-2731
DOI:10.1016/s0040-6090(01)01675-3