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Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates

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Bibliographic Details
Published in:	Thin solid films 2002-06, Vol.413 (1-2), p.186-197
Main Authors:	GRONER, M. D, ELAM, J. W, FABREGUETTE, Eh, GEORGE, S. M
Format:	Article
Language:	English
Subjects:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport phenomena in thin films and low-dimensional structures Exact sciences and technology Low-field transport and mobility piezoresistance Physics
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