Growth of carbon nanotubes by microwave plasma chemical vapor deposition using CH4 and CO2 gas mixture

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Bibliographic Details
Published in:Thin solid films 2002-12, Vol.420-421, p.230-234
Main Authors: Chen, Mi, Chen, Chieng-Ming, Chen, Chia-Fu
Format: Article
Language:English
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ISSN:0040-6090
DOI:10.1016/S0040-6090(02)00800-3