Determination of the thickness and optical constants of thin films from transmission spectra

A method has been developed to determine the thickness and the wavelength-dependent refractive indices and absorption coefficients of thin optical films by fitting a five parameter function to measured transmission spectra. Initial values for the fitting parameters are obtained from the transmission...

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Bibliographic Details
Published in:Thin solid films 1996-09, Vol.286 (1), p.164-169
Main Authors: Kubinyi, M, Benkö, N, Grofcsik, A, Jones, W.Jeremy
Format: Article
Language:English
Subjects:
Amorphous materials
Optical properties
Optical spectroscopy
Silicon
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Summary:A method has been developed to determine the thickness and the wavelength-dependent refractive indices and absorption coefficients of thin optical films by fitting a five parameter function to measured transmission spectra. Initial values for the fitting parameters are obtained from the transmission values at the spectral maxima and minima of the interference patterns created by the films. This is followed by a systematic variation of those parameters which can cause a failure of the calculation by reaching local minima of the residual sum of squares. The final fitting is performed with a Marquardt algorithm. A Monte Carlo simulation has indicated that the accuracy of this method is at least one order of magnitude better than that of the methods utilising only the interference extrema.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(96)08737-8