Microstructure of BN:C films deposited on Si substrates by reactive sputtering from a B4C target

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Bibliographic Details
Published in:Thin solid films 1996-10, Vol.287 (1-2), p.193-201
Main Authors: Johansson, M.P., Hultman, L., Daaud, S., Bewilogua, K., Lüthje, H., Schütze, A., Kouptsidis, S., Theunissen, G.S.A.M.
Format: Article
Language:English
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ISSN:0040-6090
DOI:10.1016/S0040-6090(96)08772-X