Effect of substrate heating on elimination of pinholes in sputtering deposited SiO2 films on LiNbO3 single crystal substrates

Saved in:
Bibliographic Details
Published in:Thin solid films 1998-12, Vol.335 (1-2), p.117-121
Main Authors: NAGATA, H, FUJINO, T, MITSUGI, N, TAMAI, M
Format: Article
Language:English
Subjects:
Applied sciences
Circuit properties
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Fiber waveguides, couplers, and arrays
Integrated optics. Optical fibers and wave guides
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Optical and optoelectronic circuits
Physics
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(98)00967-5