Combustion chemical vapor deposition of CeO2 film

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Bibliographic Details
Published in:Thin solid films 1999-06, Vol.347 (1-2), p.25-30
Main Authors: CARTER, W. B, BOOK, G. W, POLLEY, T. A, STOLLBERG, D. W, HAMPIKIAN, J. M
Format: Article
Language:English
Subjects:
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(98)01617-4