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Structural transition of crystalline Y2O3 film on Si(111) with substrate temperature

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Bibliographic Details
Published in:	Thin solid films 1999-07, Vol.349 (1-2), p.266-269
Main Authors:	CHO, M.-H, KO, D.-H, JEONG, K, WHANGBO, S. W, WHANG, C. N, CHOI, S. C, CHO, S. J
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Ion and electron beam-assisted deposition ion plating Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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