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HfO2 films with high laser damage threshold

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Bibliographic Details
Published in:Thin solid films 2000-01, Vol.358 (1-2), p.250-258
Main Authors: Alvisi, M., Di Giulio, M., Marrone, S.G., Perrone, M.R., Protopapa, M.L., Valentini, A., Vasanelli, L.
Format: Article
Language:English
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ISSN:0040-6090
DOI:10.1016/S0040-6090(99)00690-2