Effect of ultrasonic treatment on the defect structure of the Si-SiO2 system

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Bibliographic Details
Published in:Ultrasonics 1998-10, Vol.36 (10), p.1021-1025
Main Authors: KROPMAN, D, POLL, V, TAMBEK, L, KÄRNER, T, ABRU, U
Format: Article
Language:English
Subjects:
Applied sciences
Composition
defects and impurities
Condensed matter: structure, mechanical and thermal properties
Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
Electronics
Exact sciences and technology
Physics
Solid surfaces and solid-solid interfaces
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
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ISSN:0041-624X
1874-9968
DOI:10.1016/S0041-624X(98)00029-8