Vacuum gauges using elastic collisions between slow electrons and gas molecules

In the rough and partly in the medium-vacuum range elastic collisions between electrons and gas particles have a strong influence on the shape of electron trajectories. This electron scattering can be applied for pressure measurement using gauges with simple electrode structure. The paper describes...

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Bibliographic Details
Published in:Vacuum 2001, Vol.60 (1), p.191-196
Main Authors: Edelmann, Chr, Wilfert, St, Kauert, R.
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Vacuum apparatus and techniques
Vacuum gauges
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Summary:In the rough and partly in the medium-vacuum range elastic collisions between electrons and gas particles have a strong influence on the shape of electron trajectories. This electron scattering can be applied for pressure measurement using gauges with simple electrode structure. The paper describes gauge structures using this effect. Some results of the numerical calculations and experiments are presented. With the special structure of our gauges one can measure pressures in a range of nearly three decades.
ISSN:0042-207X
1879-2715
DOI:10.1016/S0042-207X(00)00379-1