Ion implantation for plasma torches

It has been shown before that the erosion of a cathode is related to the condition of its surface, particularly with respect to its composition. The composition of the surface seems to affect different parameters, including the work function of the surface. We have developed a method to implant diff...

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Bibliographic Details
Published in:Vacuum 2002-05, Vol.65 (3), p.547-553
Main Authors: Jankov, I.R., Goldman, I.D., Szente, R.N.
Format: Article
Language:English
Subjects:
Electrode erosion
Exact sciences and technology
Ion implantation
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma devices
Plasma torch
Plasma torches
Work function
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Summary:It has been shown before that the erosion of a cathode is related to the condition of its surface, particularly with respect to its composition. The composition of the surface seems to affect different parameters, including the work function of the surface. We have developed a method to implant different ions on the surface of copper plates in order to investigate the changes that those ions cause, particularly on the work function of the copper surface. The implantation of phosphorus ions on a copper plate was conducted as an example; the work function of the surface increased by approximately 20 meV; other surface analyses of the surface were also conducted. The results obtained so far indicate that it is possible to control the work function characteristics of the surface through a controlled ion implantation and through this, control the electrode erosion of plasma torches.
ISSN:0042-207X
1879-2715
DOI:10.1016/S0042-207X(01)00470-5