New routes to SnO2 heteroepitaxy

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Bibliographic Details
Published in:Vacuum 2002-09, Vol.67 (3-4), p.571-575
Main Authors: TARRE, A, ROSENTAL, A, AIDLA, A, AARIK, J, SUNDQVIST, J, HARSTA, A
Format: Article
Language:English
Subjects:
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Vapor phase epitaxy
growth from vapor phase
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ISSN:0042-207X
1879-2715
DOI:10.1016/S0042-207X(02)00250-6