Influence of plasma treatment on the surface properties and coating behaviour of silicon dioxide and glass surfaces

Under glow discharge treatment, SiO 2 and glass substrates change in surface morphology and surface structure, as revealed by electron micrographs and electron diffraction patterns. Crystallization and deposition processes are observed, which manifest the importance of transport reactions. In the be...

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Bibliographic Details
Published in:Vacuum 1978-01, Vol.28 (3), p.125-134
Main Authors: Tiller, H-J, Grosch, M, Dumke, K, Sokoll, R
Format: Article
Language:English
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Summary:Under glow discharge treatment, SiO 2 and glass substrates change in surface morphology and surface structure, as revealed by electron micrographs and electron diffraction patterns. Crystallization and deposition processes are observed, which manifest the importance of transport reactions. In the bell jars of vacuum deposition apparatuses, containing metal electrodes or metal parts bordering on the plasma, substrates are found to get coated by metal or metal oxide. This has a permanent effect on surface properties (such as wetting behaviour and nucleus formation) and on the properties of metal layers deposited afterwards. This is proved experimentally by measuring the contact angles and the optical properties of Al deposits on pre-coats of Sn, Al, Pd, Ni, Cu, Au, Ag and Zn in H 2 and Ar plasmas.
ISSN:0042-207X
1879-2715
DOI:10.1016/S0042-207X(78)80239-5