Modelling of the angular distribution of sputtered particles from roughened elemental and alloy targets

A solid surface subjected to energetic ion bombardment generally develops characteristic structures, which may change the total and partial sputtering yields significantly. The change is caused by several competing effects, for instance, change of the effective projectile incidence angle, recapture...

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Bibliographic Details
Published in:Vacuum 1996-12, Vol.47 (12), p.1465-1472
Main Authors: Zhenxia, Wang, Wenyun, Luo, Chuanshan, Wang, Wenmin, Wang
Format: Article
Language:English
Subjects:
Applied sciences
Atomic, molecular, and ion beam impact and interactions with surfaces
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electron and ion emission by liquids and solids
impact phenomena
Exact sciences and technology
Impact phenomena (including electron spectra and sputtering)
Metals. Metallurgy
Physics
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Summary:A solid surface subjected to energetic ion bombardment generally develops characteristic structures, which may change the total and partial sputtering yields significantly. The change is caused by several competing effects, for instance, change of the effective projectile incidence angle, recapture of obliquely ejected particles (shadowing effect), and element local-enrichment in different micro-regions on the alloy surface. In this article, we have developed a new theoretical method to take account of all the above effects. This method and its application to the analysis of experimental results for elemental (Cd) and alloy system (Al x-Sn 100 − x) targets is described in detail.
ISSN:0042-207X
1879-2715
DOI:10.1016/S0042-207X(96)00199-6