Analyses of system error in the measurement of liquid crystal empty cell gap by means of interferometry

Influences on system error and relative standard deviation in the measurement of liquid crystal empty cell gap are analyzed in great detail. Great differences exist in system error and standard deviation among measuring methods. Momentum Scanning Interferometry (MSI) using the P wave can keep system...

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Bibliographic Details
Published in:Displays 2000-08, Vol.21 (2), p.121-126
Main Authors: Zhu, Henian, Lin, Qiang, Zhang, Baizhe
Format: Article
Language:English
Subjects:
Display devices, liquid-crystal devices
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Interferometry
Liquid crystal cell gap
Optical elements, devices, and systems
Optics
Physics
System error
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Summary:Influences on system error and relative standard deviation in the measurement of liquid crystal empty cell gap are analyzed in great detail. Great differences exist in system error and standard deviation among measuring methods. Momentum Scanning Interferometry (MSI) using the P wave can keep system error at a small level. ITO and PI layers are the main sources of system error, but their influence on MSI using the P wave is the least among different methods. Based on these analyses, an effective solution, MSI using sloping tiny beam, is presented. It can be used to measure the distribution of cell gap on line and is of high resolution, good repeatability, good stability and high precision.
ISSN:0141-9382
1872-7387
DOI:10.1016/S0141-9382(00)00037-8