Photoelectric automatic focusing system based on interference

The principle and the method of a new automatic focusing system are presented in this paper. The system is constructed relying on the relationship between laser wave interference patterns and defocusing displacement. A CCD linear array receives interference patterns in the form of light intensity, w...

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Bibliographic Details
Published in:Optics and lasers in engineering 2001-10, Vol.36 (4), p.345-353
Main Authors: Liu, T.G., Cai, H.Y., Zhang, F.L., Lessard, R.A., Zhang, Y.M.
Format: Article
Language:English
Subjects:
Automatic focusing
Conventional optical microscopes
Data sampling
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Laser interference
Optical instruments, equipment and techniques
Physics
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Summary:The principle and the method of a new automatic focusing system are presented in this paper. The system is constructed relying on the relationship between laser wave interference patterns and defocusing displacement. A CCD linear array receives interference patterns in the form of light intensity, which are converted into digital signals afterwards. Then the computer controls a stepping motor to complete auto-focusing process according to the digital results. The system has been applied in a kind of film resolution testing instrument and it shows that it has the advantage of high accuracy, high speed and wide applications.
ISSN:0143-8166
1873-0302
DOI:10.1016/S0143-8166(01)00058-6