Thermal decomposition of di-n-butyltin(IV) diacetate as a precursor for the spray pyrolysis deposition of oriented SnO2 thin films

[100]-Oriented SnO2 thin films were obtained on glass substrates from di-n-butyltin(IV) diacetate at 480°C by a spray pyrolysis deposition technique. The thermal decomposition processes of the starting materials were studied by vapor pressure measurement, gas chromatography, and mass spectroscopy fo...

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Bibliographic Details
Published in:Solid state ionics 2001-05, Vol.141-142, p.463-470
Main Authors: Kaneko, Shoji, Yagi, Isao, Murakami, Kenji, Okuya, Masayuki
Format: Article
Language:English
Subjects:
Spray pyrolysis deposition
Thermal decomposition process
Thin film
Tin(IV) oxide
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Summary:[100]-Oriented SnO2 thin films were obtained on glass substrates from di-n-butyltin(IV) diacetate at 480°C by a spray pyrolysis deposition technique. The thermal decomposition processes of the starting materials were studied by vapor pressure measurement, gas chromatography, and mass spectroscopy for the elucidation of the formation mechanism of the films. Consequently, a growth model concerning the [100]-oriented SnO2 thin films was proposed on the basis of crystallographic considerations, in which the chemical species O–Sn–O appears to be the pyrolytic product of the starting material.
ISSN:0167-2738
1872-7689
DOI:10.1016/S0167-2738(01)00847-5