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Pt-based metallization of PMOS devices for a compatible monolithic integration of semiconducting/Yba2Cu3O7-δ superconducting devices on silicon

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Bibliographic Details
Main Authors: HURT, G, MECHIN, L, BLOYET, D
Format: Conference Proceeding
Language:English
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ISSN:0167-9317
1873-5568
DOI:10.1016/S0167-9317(03)00379-4