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Pt-based metallization of PMOS devices for a compatible monolithic integration of semiconducting/Yba2Cu3O7-δ superconducting devices on silicon
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Main Authors: | , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/S0167-9317(03)00379-4 |