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A new fabrication technique for silicon nanowires

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Bibliographic Details
Published in:	Microelectronic engineering 2004-06, Vol.73-74, p.594-598
Main Authors:	SHEU, J. T, KUO, J. M, YOU, K. S, CHEN, C. C, CHANG, K. M
Format:	Article
Language:	English
Subjects:	Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Citations:	Items that cite this one
Online Access:	Get full text
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