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Lateral SiGe heterojunction bipolar transistor by confined selective epitaxial growth: simulation and material growth
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Published in: | Microelectronic engineering 2004-06, Vol.73-74, p.508-513 |
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Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that cite this one |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/S0167-9317(04)00202-3 |