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Lateral SiGe heterojunction bipolar transistor by confined selective epitaxial growth: simulation and material growth

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Bibliographic Details
Published in:Microelectronic engineering 2004-06, Vol.73-74, p.508-513
Main Authors: PENGPAD, P, OSMAN, K, LLOYD, N. S, BONAR, J. M, ASHBURN, P, KEMHADJIAN, H. A, HAMEL, J. S, BAGNALL, D. M
Format: Article
Language:English
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ISSN:0167-9317
1873-5568
DOI:10.1016/S0167-9317(04)00202-3